High Sensitive Tilt Sensor for Quartz Micromachining
نویسندگان
چکیده
منابع مشابه
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Beijing Research Institute of Telemetry, Beijing 100000, China; [email protected] (C.Z.); [email protected] (D.X.H.); [email protected] (X.F.J.); [email protected] (S.M.Z.); [email protected] (J.B.Z.); [email protected] (M.M.W.); [email protected] (W.B.L.); [email protected] (Y.B.G.) * Correspondence: [email protected]; Tel.: +86-10-6819-8271 † Presented at the Eurosensors 2017 Conference, Paris, ...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2007
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.127.431